This image shows Karsten Frenner

Karsten Frenner


Supervisor of Subproject A2
Institute of Applied Optics
High Resolution Metrology and Simulation


+49 711 685 66065

Pfaffenwaldring 9
70569 Stuttgart
Room: 1.218

Office Hours

Please feel free to ask for an appointment via mail or phone.


The emphasis lies on the rigorous simulation of the actual light-structure interaction including the modeling of complete optical measurement processes. Another topic is the experimental investigation of new and proven methods for metrology that use besides the intensity also the polarization and phase of the light as additional information channels to obtain maximum structural information accuracy. The measurement methods include various microscopic methods as well as diffraction and polarization-resolved scatterometry.

The following lectures are offered (only in german):

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