Contact
+49 711 685 66065
+4971168566586
Email
Pfaffenwaldring 9
70569 Stuttgart
Germany
Room: 1.218
Office Hours
Please feel free to ask for an appointment via mail or phone.
Subject
The emphasis lies on the rigorous simulation of the actual light-structure interaction including the modeling of complete optical measurement processes. Another topic is the experimental investigation of new and proven methods for metrology that use besides the intensity also the polarization and phase of the light as additional information channels to obtain maximum structural information accuracy. The measurement methods include various microscopic methods as well as diffraction and polarization-resolved scatterometry.
The following lectures are offered (only in german):
